Title: Three position integrated micro mechanical resonant beam system
Application Number: 200610114277 Application Date: 2006.11.03
Publication Number: 1945216 Publication Date: 2007.04.11
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: G01D5/12;G01H11/00
Applicant(s) Name: Beijing Univ. of Aeronautics and Astronautics Address:
Inventor(s) Name: Fan Shangchun;Xing Weiwei;Cai Chenguang
Attorney & Agent: jiayu zhong luji
Abstract:
    The trinity micro mechanical resonant beam system for the stress and displacement measurement in micro mechanical device consists of resonant beam with natural frequency for calculating the measured quantity, sensing structure and control circuit. The sensing structure is mainly a double end clamped conducting resonant beam set inside constant magnetic field and with ends connected to the control circuit; the control circuit outputs intermittent exciting signal to the resonant beam, detects the resonance pick up signal of the resonant beam in free vibration, resolves the vibration information in scanning correlation method, regulates the exciting signal based on the vibration information and tracks the natural frequency of the resonant beam. The present invention realizes the functions of resonator, exciter and detector with one single resonant beam and has simplified sensing structure.
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