Title: Wide-range displacement transducer for measuring linear phase grating profile
Application Number: 200610125389 Application Date: 2006.12.08
Publication Number: 1971209 Publication Date: 2007.05.30
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: G01B11/24;G01B11/25;G01B11/02;G01D5/34;G01D5/38
Applicant(s) Name: Huazhong University of Science Address:
Inventor(s) Name: Wang Shuzhen;Chang Suping;Xie Tiebang
Attorney & Agent: caobao jing
Abstract:
    The invention discloses a profilometry displacement sensor with big measuring range and linear phase grating. Integral cutting parallel spring is constructed by a frame cut by a steel spring plate and a parallel spring, a laser is mounted on the frame; scaleplate grating is fixed to end of the parallel spring; the three gratings are parallel with each other; attachment link is connected with the scaleplate grating, and connected with boning rod via butt, the boning rod is mounted on the butt of spider reed, stylus is fixed to the other end of the boning rod; the light beam outgo from laser passes the three gratings sequentially to generate interference fringe, light-sensitive detector receives the three interference fringes and transform the optical signal to electrical signal, the electrical signal is then transferred to signal processing circuit and proceeded. The invention of profilometry displacement sensor is characterized in that the measurement range is wide, the measurement accuracy is high, and the structure is simple, the cost is low and it is free of assembly error. The sensor can be used to measure the boundary dimension of workpiece, surface shape error, workpiece and surface roughness, the measuring range of the sensor is 0-8mm, resolution ratio can achieve 5nm.
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