| Title: | Position detecting device and inclination sensor device of surveying apparatus using the same | ||
| Application Number: | 200610152410 | Application Date: | 2006.09.29 |
| Publication Number: | 1945208 | Publication Date: | 2007.04.11 |
| Approval Pub. Date: | Granted Pub. Date: | ||
| International Classifi-cation: | G01C15/00 | ||
| Applicant(s) Name: | Topcon Corp. | Address: | |
| Inventor(s) Name: | Kumagai Kaoru;Yamaguchi Shinji | ||
| Attorney & Agent: | shouning zhanghua hui | ||
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Abstract: |
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| The present invention provided a position detecting device which can realize the miniaturization of the optical configuration of the projection optics system. A position detecting device includes: a liquid (7) having a free surface (7a); a light source (2) configured to irradiate a light flux toward the free surface (7a) of the liquid (7); a dark field pattern (4) provided between the liquid (7) and the light source (2) and configured to form a pattern of the light flux irradiated by the light source (2); a light-receiving sensor (9) configured to detect the pattern of the light flux reflected by the free surface (7a) of the liquid; and an arithmetic unit (11) configured to calculate a position of the pattern from results of detection of the light-receiving sensor (9), wherein the arithmetic unit (11) is configured to add the results of the detection of the light-receiving sensor (9) in an X-direction and a Y-direction of the light-receiving sensor (9), and the arithmetic unit is configured to calculate the position of the pattern from an output obtained by adding the results of the detection in the X-direction and the Y-direction. | |||
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| Time: | 7 | ||
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