Title: Capacitive type complete decoupling horizontal axis miniature mechanical gyro
Application Number: 200610114485 Application Date: 2006.11.10
Publication Number: 1948906 Publication Date: 2007.04.18
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: G01C19/56;G01P9/04
Applicant(s) Name: Beijing Univ. Address:
Inventor(s) Name: Liu Xuesong;Liu Ye;Ding Haitao;Yang Zhenchuan;Yan
Attorney & Agent: xuning guanchang
Abstract:
    The invention relates to capacitance complete decoupling horizontal axis micro mechanical gyro. Its features are that it includes glass substrate, drive capacitance, drive feedback capacitance, test capacitance, drive mass block, asymmetry mass block, and test mass block. The drive mass block is set on the center of which two ends are respectively connected with the glass substrate. The mobile electrode of the drive capacitance and drive feed back capacitance are connected with the drive block. And their fixed electrodes are connected with glass substrate. The outside two ends of the asymmetry mass block are connected with the test mass block. And the inside two ends are connected with the drive mass block. The mobile electrode of the test capacitance is fixed on the test mass block. And its fixed electrode is fixed on the glass substrate. The two ends of the test mass block are fixed on the glass substrate. The invention has double-decoupling structure which can restrain ghost effect, reduce excursion, and good linearity and offset axis sensitivity.
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