Title: Laser heterodyne common-circuit interference method and its optic system
Application Number: 92103398 Application Date: 1992.05.16
Publication Number: 1079055 Publication Date: 1993.12.01
Approval Pub. Date: Granted Pub. Date: 1997.04.09
International Classifi-cation: G01B11/30,G02B27/00
Applicant(s) Name: Changchun Optic Precision Machinery Inst., Chinese Address: 130022
Inventor(s) Name: Gu Quwu, Han Changyuan
Attorney & Agent: LIANG AIRONG
Abstract:
     The present invention relates to an apparatus for measuring roughness of body ultra-smooth surface, fine surface profile, micro-displacement and micro-deformation and its measurement method. It is an improvement on the laser heterodyne interference method and its system. The invented commonpath interference system consists of light source, receiver, receiver, beam splitter, polarization beam splitter, multilateral reflection prism, polarization beam splitter, wave plate, lens, lens, reflection prism and multilateral reflection prism. The present invention has the commonpath interference system, so that the reference light beam and measuring light beam can be reciprocally progressed in a same lightpath, and the measurement signal is produced by means of interference of receiver so as to make the optical system have the high stability and accuracy.
Time: 11