Title: Method for measuring micro-displacement by means of tunnel effect
Application Number: 92109735 Application Date: 1992.09.05
Publication Number: 1071249 Publication Date: 1993.04.21
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: G01B7/02
Applicant(s) Name: Wuhan Polytechnic Univ. Address: 430070
Inventor(s) Name:
Attorney & Agent: ZHOU YUDE
Abstract:
     This invented method to measure micro displacement or micro deformation of a body by means of tunnel effect features that specimen to be measured, measuring needle tip, piezoelectric ceramic, voltmeter, bias power supply and amplifier constitute a closed-loop negative feedback measure system having a resolution of 0.1-1 nm.
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