Title: Lattice parameter measuring method and instrument
Application Number: 93105072 Application Date: 1993.05.20
Publication Number: 1080394 Publication Date: 1994.01.05
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: G01B11/02
Applicant(s) Name: Qinghua Univ. Address: 100084
Inventor(s) Name: Li Zhi, Li qingxiang
Attorney & Agent: ZHANG RUIPU
Abstract:
     The present optical measuring instrument can measure parameters of and distance between spherical-crown lattices. Optical objective is focused to lattices separately, and the values of objective position are recorded, the difference between two positions is the interval between the two lattices. The said instrument comprises five parts; precision mechanical system, optical system, step motor and its driving system, grating positioning and measuring system and signal acquisition system. Through software processing, it can focus automatically and print the lattice parameters measured, and its high measurement accuracy is favourable to improvement of travelling wave valve.
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