Title: High-precision large aperture phase-shifting digital planar interferometer
Application Number: 93111560 Application Date: 1993.06.26
Publication Number: 1096873 Publication Date: 1994.12.28
Approval Pub. Date: Granted Pub. Date: 1998.06.17
International Classifi-cation: G01B9/02,G01B11/30
Applicant(s) Name: Nanjing Univ. of Science Address: 210014
Inventor(s) Name: Chen Jinbang, Song Dezhen, Zhu Rihong, Chen Jinban
Attorney & Agent: ZHANG JUNMING
Abstract:
     The said interferometer mainly consists of Fizeau interferometer, expander, phase shifter and its driver, controller, image collector system and microcomputer. It has the following features: effective detection aperture 245mm, accuracy 0.02 wavelength, optical system quality 0.05 wavelength, expanding aperture up to 500mm and expanding accuracy 0.05 wavelength. It can automatically correct non-linear displacement error of phase shifter and adopts damped liquid surface as reference for correcting systemetic error, so that it has high accuracy and is esp suitable for the detection of large-aperture planar optical glass.
Time: 10
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