Title: Method and arrangement for measuring by making use optical and electric means with submicron resolution factor
Application Number: 93112518 Application Date: 1993.08.10
Publication Number: 1089718 Publication Date: 1994.07.20
Approval Pub. Date: Granted Pub. Date: 1998.01.14
International Classifi-cation: G01B11/02,G01B21/02
Applicant(s) Name: Shanghai Inst. of Optics and Fine Mechanics, Chine Address: 201800
Inventor(s) Name: Wang Guiying, Ding Jun
Attorney & Agent: LI LANYING
Abstract:
     This invention can measure standard wire width and also measure micro-facula scale. It is composed of computer, display, A/D convertor and memory portion, photoelectric probe and image-contained transfer system, soft-edged raster, measured object stand, discrimination plate and optical portion of illumination system. Its measuring device and method have the advantages of high resolution (in submicron grade), long working distance, large depth of field, possibility of making absolute measurement, no interference from surrounding environment, simple structure, convenient operation, low cost, and wide application.
Time: 8
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