Title: Thin film thickness monitoring and control
Application Number: 93117694 Application Date: 1993.09.14
Publication Number: 1085655 Publication Date: 1994.04.20
Approval Pub. Date: 2000.02.02 Granted Pub. Date: 2000.02.02
International Classifi-cation: G01B11/06
Applicant(s) Name: Glaverbel Address:
Inventor(s) Name: Michel Hannotlau;Guy Renard;Robert Terneu
Attorney & Agent: DONG JIAYANG
Abstract:
    A method is described for monitoring the thickness and uniformity of a transparent coating applied to a substrate in sheet form. The method comprises directing polychromatic light at the coating at a plurality of locations and measuring the intensity of light reflected from said coating. At each location, the intensity of reflected light is measured at at least two discrete monitoring wavelengths and said measurements are processed to generate an electrical signal which may be compared with one or more predetermined threshold values and with such electrical signals generated at other locations to yield indications of whether the thickness and uniformity of the coating lies within predetermined tolerance values. The monitoring results may be used to adjust the coating process.
Time: 8
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