Title: Substrate cleaning brush, and substrate treatment apparatus and substrate treatment method using the same
Application Number: 200610105801 Application Date: 2006.07.07
Publication Number: 1891355 Publication Date: 2007.01.10
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: B08B1/00;B08B11/00;H01L21/304
Applicant(s) Name: Dainippon Screen Mfg Address:
Inventor(s) Name: Iwami Masaki;Sato Masanobu
Attorney & Agent: xu shu
Abstract:
    An inventive substrate cleaning brush includes a peripheral surface cleaning portion, and a marginal area cleaning portion connected to the peripheral surface cleaning portion. The peripheral surface cleaning portion has a peripheral surface cleaning surface to be pressed against a peripheral surface of a substrate. The marginal area cleaning portion has a marginal area cleaning surface to be pressed against a marginal area of a major surface of the substrate, and the marginal area cleaning surface projects from the peripheral surface cleaning surface by a variable projection length.
Time: 18
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