Title: Method for removing organic electroluminescent residues from a substrate
Application Number: 200610142756 Application Date: 2006.09.20
Publication Number: 1937280 Publication Date: 2007.03.28
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: H01L51/56;B08B7/00;C23C14/00;C23C16/00
Applicant(s) Name: Air Prod Address:
Inventor(s) Name:
Attorney & Agent: liujie duanxiao ling
Abstract:
    A process for removing organic electroluminescent residues from a substrate is described herein. The process includes the steps of providing a process gas comprising a fluorine-containing gas, optionally an oxygen-containing gas, and optionally an additive gas; activating the process gas in a remote chamber using at least one energy source to provide reactive species; and contacting the surface of the substrate with the reactive species to volatilize and remove the organic electroluminescent residue from the surface.
Time: 11