Title: Substrate transfer apparatus
Application Number: 200610141038 Application Date: 2006.09.28
Publication Number: 1939816 Publication Date: 2007.04.04
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: B65G13/00;B65G49/00;B65G49/05;B65H9/16;B08B3/04;H01L21/677;H01L21/687;H05K13/02
Applicant(s) Name: Shinko Electric Ind Co. Address:
Inventor(s) Name: Suyama Toshiaki;Kawahara Makoto;Yamazaki Masaru;Ro
Attorney & Agent: gugong xia zhangtian shu
Abstract:
    A substrate transfer apparatus has pluralities of pairs of substrate support mechanisms. The substrate support mechanism includes a first roller provided on a first rotary shaft and a second roller provided on a second rotary shaft, the substrate support mechanism transfers a substrate in a transfer direction while supporting the substrate between the first and second rollers in a thickness direction of the substrate. The pair of the substrate support mechanisms are disposed so as to oppose to each other in a width direction of the substrate and the pairs of the substrate support mechanisms are arranged along with the transfer direction. Further, a substrate position regulating member that regulates a position of the substrate by contacting with a side surface which is parallel to the transfer direction is provided on either of the first and second rotary shafts.
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