Title: Device and method for cleaning semiconductor silicon chip
Application Number: 200610147841 Application Date: 2006.12.22
Publication Number: 1986086 Publication Date: 2007.06.27
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: B08B3/12;H01L21/00
Applicant(s) Name: Shanghai IC R Address:
Inventor(s) Name: Zhang Chencheng
Attorney & Agent: wangji
Abstract:
    The present invention provides semiconductor silicon chip cleaning device. The cleaning device includes one cleaning water tank, one silicon chip bearing carrier, one cantilever stretched into cleaning water tank, and at least one ultrasonic vibration generator on the cantilever to provide ultrasonic energy. Compared with available technology, the present invention has the advantages of homogeneous ultrasonic energy, effective cleaning, less damage to the semiconductor silicon chip, high production efficiency and wide application.
Time: 8