Title: Decompression processing device
Application Number: 200610149849 Application Date: 2006.10.27
Publication Number: 1958172 Publication Date: 2007.05.09
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: B05C9/12;B05D3/00;C03C17/00
Applicant(s) Name: Tokyo Oka Gogyo K. K. Address:
Inventor(s) Name: Kajima Juno;Takase Shinji;Shoyoshi Akira
Attorney & Agent: luoyun po xuqian
Abstract:
    Disclosed is a decompression processing device for forming uniform envelop on large scale glass substrate. Auxiliary exhaust ducts (9) branching from primary exhaust duct (8,8) extend along the upper surface of a case body (3), suction parts (10) having opening to decompression processing space in the case body (3) are mounted at front end of each auxiliary exhaust ducts (9). The suction parts (10) are arranged at a position symmetric in both sides of the axes as reference in overlook observation. The suction parts (10) are arranged in such positions that even vacuum is drawn in the decompression processing space whinin a short time, temperature nonuniformity can be prevented.
Time: 30