Title: Substrate processing device and method
Application Number: 200610074624 Application Date: 2006.04.20
Publication Number: 1853799 Publication Date: 2006.11.01
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: B05C5/02,B05C11/10,B05B13/04,B05B1/14,H01L21/027
Applicant(s) Name: Shibaura Mechatronics Corp. Address:
Inventor(s) Name: Imaoka Yuichi
Attorney & Agent: chen yangdun
Abstract:
     The invention discloses a disposing device of disposing liquid without bubble for base, which comprises the following parts: container bulk (32), blank bulk (33) to divide the container bulk into inflow part (34) and overflowed liquid reserving part (35), sprayer hole (40) to supply the disposed liquid in the liquid reserving part to the upper surface of base according to regular height, warp part (41) on the upper end of lateral wall of inflow part to flow bubble out of container bulk without passing the liquid reserving part (35).
Time: 15