Title: Liquid drop discharge device, pattern forming method, and method of producing electro-optical device
Application Number: 200680000387 Application Date: 2006.05.12
Publication Number: 1976759 Publication Date: 2007.06.06
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: B05C5/00;G02F1/13;B05C9/12;G02F1/1335;B05D1/26;G02F1/1337
Applicant(s) Name: Seiko Epson Corp. Address:
Inventor(s) Name: Miura Hirotsuna
Attorney & Agent: ligui liang
Abstract:
    A liquid droplet ejection apparatus has a droplet ejecting portion and an energy beam radiating portion. The liquid droplet ejecting portion ejects droplets containing pattern forming material onto an ejection target surface. The energy beam radiating portion radiates an energy beam onto a boundary between the droplets that have been received by the ejection target surface at different timings so as to move boundary areas of the droplets. Accordingly, using the liquid droplet ejection apparatus, a pattern having an accurately defined shape can be formed.
Time: 12