Title: Electronic device for direct slurry atomization and deposition
Application Number: 200610019527 Application Date: 2006.06.30
Publication Number: 1876244 Publication Date: 2006.12.13
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: B05C5/02,B05C11/10,B05B13/02,H05K3/10,H01L49/02
Applicant(s) Name: Huazhong University of Science Address: 430074
Inventor(s) Name: Zeng Xiaoyan, Li Xiangyou, Li Jing, Li Jinhong
Attorney & Agent: cao baojing
Abstract:
     The disclosed electronic slurry atomization deposition direct-write device comprises: a deposition nozzle, a base plate, a work bench controlled by a controller, two atomizing nozzles every with a gas nozzle connected to gas source and a liquid nozzle connected to slurry pipe end both in the atomization cavity, and a butt-joint jet pipe with co-axial upper and lower jet pipes, wherein arranging a micro-pressure gauge in the cavity, arranging a adjustable valve in the decompression recovery cavity. This invention has well atomization effect, and runs stably and conveniently.
Time: 11
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