Title: Device for controlling dispensing error in photo spinner equipment
Application Number: 200610105579 Application Date: 2006.07.17
Publication Number: 1899707 Publication Date: 2007.01.24
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: B05C5/02;B05C11/10
Applicant(s) Name: Samsung Electronics Co., Ltd. Address:
Inventor(s) Name: Lee Jong-hwa;Park Chan-hoon;Chyun Ki-hyun
Attorney & Agent: lin yuqing xie lina
Abstract:
    A chemical solution dispensing device adapted for use with photo spinner equipment is disclosed. The device includes a nozzle adapted to spray chemical solution onto a wafer, a pressure sensor associated with the nozzle and adapted to sense a spraying pressure and generate a pressure value corresponding to the sensed spraying pressure, and a controller adapted to receive the pressure value, compare the received pressure value to a predetermined threshold pressure value, and generate an interlock signal when the received pressure value exceeds the predetermined threshold pressure value.
Time: 13
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