Title: Photological foreign body checkout gear and treatment fluid applying apparatus containing same
Application Number: 200610159929 Application Date: 2006.09.26
Publication Number: 1940537 Publication Date: 2007.04.04
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: G01N21/95;H01L21/66;B05C5/02
Applicant(s) Name: Tokyo Electron Ltd. Address:
Inventor(s) Name:
Attorney & Agent: longchun
Abstract:
    The invention provides an optical foreign matter detector capable of detecting the abnormal state of a planar substrate with proper sensitivity, and a treatment liquid coating device loaded therewith. The substrate to be treated placed on a stage in a horizontal state and a treatment liquid supply nozzle, having a slit-like discharge opening, extending in the width direction of the substrate are relatively moved, and the treatment liquid discharged in a strip-like state from the treatment liquid supply nozzle is applied to the surface of the substrate. A light-transmitting type sensor unit, which is composed of a floodlight projection part and a light detection part is mounted on the substrate, in front of the moving direction of the treatment liquid supply nozzle relatively moved with respect to the substrate. The sensor unit is equipped with a first detection means for detecting whether the light detection output of the laser beam in the light detection part is a predetermined value or larger, and a second detection means for detecting whether the change quantity of the light detection output per a unit time is a predetermined value or larger, and the presence of foreign matter is detected, on the basis of the logical addition of the detection outputs of the first and second detection means.
Time: 11
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