Title: Coating device and method
Application Number: 200610141450 Application Date: 2006.09.29
Publication Number: 1970168 Publication Date: 2007.05.30
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: B05C5/02;B05C9/06;B05C13/02;B05B13/02;B05B15/04;H01L21/027
Applicant(s) Name: Dainippon Screen Mfg Address:
Inventor(s) Name: Suzuki So
Attorney & Agent: xushu
Abstract:
    A coating device has: a coating head for continuity spurting out organic EL liquid to basal plate (9); a head moving mechanism and a basal plate (9) moving mechanism for relatively moving coating head relative to main scanning direction and sub scanning direction of the basal plate (9); a control part for controlling above mechanisms. In coating device, mechanisms are controlled by control part, while organic EL liquid is coated on the coating area (91) of the basal plate (9), organic EL liquid is coated on terminal side of the basal plate (9) moving relative to coating head in sub scanning direction, and on non-coating area (92) outside the the coating area (91). Therefor, the condition that, the menstruum component of the organic EL liquid in environment becomes high and the drying time of the organic EL liquid is shorter than that of other coated areas, is suppressed, on the terminal side coated organic EL liquid of the the coating area (91) of the basal plate (9).
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