Title: Slit nozzle
Application Number: 200610149985 Application Date: 2006.10.25
Publication Number: 1954924 Publication Date: 2007.05.02
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: B05B1/02;B05C5/02;C03C17/00;H01L21/02
Applicant(s) Name: Tokyo Applied Chemical Industr Address:
Inventor(s) Name: Takase Shinji;Masuyoshi Akira
Attorney & Agent: luoyun po xuqian
Abstract:
    The present invention relates to a slit nozzle, the width of the discharge opening of which is uniform in length direction, capable of reducing the affect to coating distribution caused by the stress transferred from bolt directly. A end opening, for intruding the via holes(11, 12)of bolt(31), is formed on the grooves(16, 17)extending along length direction, rather than is made to directly contact with the opposite surface of the opposed half body(2), thus, the fastening force of bolt(31)will not focus on the opening circumference of the via holes(11, 12)but uniformly disperses in the length direction of the nozzle. As a result, the width of the slit discharge opening(14)changes to be uniform.
Time: 14