Title: Vacuum deposition device and method therefor
Application Number: 200510101739 Application Date: 2005.11.24
Publication Number: 1970826 Publication Date: 2007.05.30
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: C23C14/24;B05B1/14
Applicant(s) Name: Qunkang Technology (Shenzhen) Co., Ltd. Address:
Inventor(s) Name: Huang Ronglong;Peng Jiapeng;Lai Jianting;Yang Qiul
Attorney & Agent:
Abstract:
    The invention discloses a vacuum depositing device and method, which comprises the following parts: vacuum cavity, injector, gas supplying pipe, diffusing device and working bench, wherein the injector and working bench are set in the vacuum cavity with multiple air holes on the injector; the gas supplying pipe connects air hole; the diffusing device is fixed on the injector.
Time: 8