Title: Cleaning method and cleaning apparatus
Application Number: 200610073365 Application Date: 2006.03.31
Publication Number: 1840248 Publication Date: 2006.10.04
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: B08B3/08,B08B3/02,B05B7/04,B08B3/10,H01L21/304,G02F1/13
Applicant(s) Name: Tokyo Shibaura Electric Co. Address:
Inventor(s) Name: Hayamizu Naoya
Attorney & Agent: shen zhaokun
Abstract:
     A cleaning apparatus of this invention includes a cleaning water supply portion which supplies alkaline cleaning water, a high-pressure supply portion which supplies high-pressure air, and a two-fluid nozzle which atomizes the supplied cleaning water by mixing with the high-pressure air and sprays to a work piece.
Time: 5