Title: Coating device and deposition device
Application Number: 200610066782 Application Date: 2006.04.13
Publication Number: 1846876 Publication Date: 2006.10.18
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: B05C5/02,B05C13/02,B05B15/10,B05D3/06
Applicant(s) Name: Seiko Epson Corp. Address:
Inventor(s) Name:
Attorney & Agent: yu gang
Abstract:
     A coating device including a mounting section which supports a workpiece (substrate) W, a supporting section which rotatably supports the mounting section, and a plurality of spray nozzles which spray a coating liquid on the mounting section.
Time: 9