Title: Clean room system
Application Number: 200410049801 Application Date: 2004.06.24
Publication Number: 1577721 Publication Date: 2005.02.09
Approval Pub. Date: 2007.03.28 Granted Pub. Date: 2007.03.28
International Classifi-cation: B01L1/04;H01L21/00;G02F1/13
Applicant(s) Name: LG Philips LCD Co., Ltd. Address:
Inventor(s) Name: Kim Dong-han
Attorney & Agent: chen jian
Abstract:
    A clean room system is provided. The clean room includes a plurality of multi-level clean rooms and an air passage. The plurality of multi-level clean rooms has at least a lower clean room and an upper clean room above the lower clean room. The air passage permits air flow between the upper clean room and the lower clean room and smooths the air flow.
Time: 16
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