Title: Extreme uv and soft x ray generator
Application Number: 200480022673 Application Date: 2004.07.29
Publication Number: 1833472 Publication Date: 2006.09.13
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: H05G2/00
Applicant(s) Name: Koninkl Philips Electronics NV Address:
Inventor(s) Name: Bergmann Klaus
Attorney & Agent: cai minjun zhao xin
Abstract:
     In a gas discharge source, in particular for generating extreme ultraviolet and/or soft X rays, a gas-filled chamber (3) is arranged between two electrodes (1, 2) and houses devices for letting in and pumping away gas, and an electrode (1) has a radiation exit opening (5) that defines an axis of symmetry (4). The improvements proposed consist in the arrangement of a diaphragm (6) between the two electrodes (1, 2), the diaphragm (6) working as a differential pumping stage and having at least one opening (7) located on the axis of symmetry (4).
Time: 7
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