Title: Soft X ray light source of laser plasma for liquid microflow jetting target
Application Number: 200410011194 Application Date: 2004.11.02
Publication Number: 1728915 Publication Date: 2006.02.01
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: H05G2/00,H05H1/26,H05H1/28
Applicant(s) Name: Changchun Inst of Optics Address: 130031
Inventor(s) Name: Ni Qiliang, Qi Lihong
Attorney & Agent: liu shuqing
Abstract:
     The invention belongs to technical area of light source in shortwave band. Technical scheme for generating laser plasma soft X ray is as follows. Structure of the scheme includes vacuum target chamber, flange, outer barrel, high-pressure chamber, refrigeration tubes, ohmic heater, sealed positioning drum, thermal baffle, valve rod and nozzle etc. Through flange, the outer barrel is fixed on top of vacuum target chamber hermetically. Inlet and outlet of refrigeration tube are fixed to left and right heat insulation tube respectively. Refrigeration tubes run out inside vacuum target chamber are enwound on flatten sect of high-pressure chamber, and ohmic heater is enwound on outside. Sealed positioning drum is welded on top of outer barrel. Upper end of valve connected to corrugated pipe is inserted to lower flute of thermal baffle. Needle of valve can seal the nozzle. Laser bean is focused on microflow jetted from nozzle so as to generate laser plasma radiation soft X-ray.
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