Title: Device for generating X-ray or XUV radiation
Application Number: 200610129176 Application Date: 2006.09.04
Publication Number: 1959924 Publication Date: 2007.05.09
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: H01J35/00;H05G1/00;H05G2/00;G01N23/223;G21K5/00
Applicant(s) Name: Comet GmbH Address:
Inventor(s) Name: Reinhold Alfred
Attorney & Agent: louxian yang
Abstract:
    Device for generating X-ray or XUV radiation includes a device for directing a particle beam of electrically charged particles towards a target. A deflection device for deflecting the particle beam is such that the central axis of the particle beam passes through a first point of deflection and a second point of deflection located at a distance from the first point of deflection in the direction of propagation of the beam. The first and second points of deflection lie on an axis in line with a determined or determinable point of impact of the particle beam with the target. The particle beam can be deflected by the deflection device in the direction of propagation of the beam in the region of one point of deflection independently from of a deflection of the particle beam in the region of the other point of deflection.
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