Title: Multiple cathode pulse arc plasma source device
Application Number: 200610010244 Application Date: 2006.06.30
Publication Number: 1901136 Publication Date: 2007.01.24
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: H01J37/08;H01J37/04;H05G1/00
Applicant(s) Name: Harbin Polytechnic Univ. Address:
Inventor(s) Name: Wang Liangping;Wang Xiaofeng;Wang Yuhang;Tang Baoy
Attorney & Agent: yue quanqing
Abstract:
    This invention relates to a multi-cathode pulse arc plasma source device, in which, this invented push rod is set in the outer wear of the cathode and connected to it, an insulation porcelain cover is set between a trigger pole mounted on the cathode and the cathode, one end of a public spring trigger rod contacts with its corresponding trigger pole, a driven gear driven by screw is mounted on the push rod, the bottom of the moving rod is set in the cathode outer wear and mounted with a driving gear, the anode is placed just under the cathode and its bottom is mounted with a stainless steel siphon assembly, which has the advantage of long time of stable work and realizing free switch to multiple cathodes without breaking vacuum.
Time: 15