Title: Ion balance adjusting method and method of removing charges from workpiece by using the same
Application Number: 200610162843 Application Date: 2006.11.24
Publication Number: 1972551 Publication Date: 2007.05.30
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: H05F3/06;H01T19/00;H01T23/00
Applicant(s) Name: SMC Corp. Address:
Inventor(s) Name: Sato Toshio;Suzuki Satoshi
Attorney & Agent: qurui
Abstract:
    When charges are removed from a charged workpiece by applying positive and negative pulse-like high voltages to positive and negative electrode needles to generate positive and negative ions in a charge removing area and feeding the charged workpiece into the charge removing area, an ion balance inside the charge removing area is measured by a surface potential sensor before the workpiece is fed into the charge removing area, and a pulse width and/or a voltage value of the pulse-like high voltage applied to the electrode needle is changed depending on a measured result, thereby adjusting an amount of ions generated from the electrode needle to take a balance between the positive and negative ions.
Time: 15
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