Title: Reducing electrostatic charge by roughening the susceptor
Application Number: 200610098582 Application Date: 2006.07.12
Publication Number: 1897784 Publication Date: 2007.01.17
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: H05F1/02;H01L21/00
Applicant(s) Name: Applied Materials Inc. Address:
Inventor(s) Name: Choi Soo Y.;Park Beom S.;Shang Quanyuan;White John
Attorney & Agent: xu jinguo liang hui
Abstract:
    A substrate support and method for fabricating the same are provided. In one embodiment of the invention, a substrate support includes an electrically conductive body having a substrate support surface that is covered by an electrically insulative coating. At least a portion of the coating centered on the substrate support surface has a surface finish of between about 200 to about 2000 micro-inches. In another embodiment, a substrate support includes an anodized aluminum body having a surface finish on the portion of the body adapted to support a substrate thereon of between about 200 to about 2000 micro-inches. In one embodiment, a substrate support assembly includes an electrically conductive body having a substrate support surface, a substrate support structure that is adapted to support the conductive body and the conductive body is covered by an electrically insulative coating.
Time: 33