Title: Air supply system of shower in water cold plasma
Application Number: 200610076036 Application Date: 2006.04.24
Publication Number: 1873919 Publication Date: 2006.12.06
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: H01L21/265,H01L21/425,C30B31/22,H01J37/317,H05H1/00,H05F3/04
Applicant(s) Name: Zhongkexin Electronic Appts. Co., Ltd., Beijing Address: 100036
Inventor(s) Name: Peng Libo, Wen Chao, He Kefeng
Attorney & Agent: zeng yongzhu
Abstract:
     The system includes a gas cylinder, four pneumatic valves, two pressure gauges, a pressure adjusting valve, a filter, and a mass flowmeter. The invention guarantees constant gas pressure delivered, controls on/off of gas circuit by pneumatic valves, and controls gas flow by the mass flowmeter with accuracy. Nitrogen gas port and vacuum interface can purify and clean out induction pipes. Seal joint of stainless steel ensures delivered gas in high purity. Features are: simple structure, high safety and reliability, and easy of installation and debugging.
Time: 11
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