Title: Soft X-ray shielding structure, soft X-ray irradiation static eliminating apparatus, and ionized-air emitting method
Application Number: 200610071796 Application Date: 2006.03.20
Publication Number: 1838854 Publication Date: 2006.09.27
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: H05F3/06,H05K9/00,G21F5/00,F24F7/00,F24F7/06,H01L21/02
Applicant(s) Name: Seiko Epson Corp. Address:
Inventor(s) Name: Honma Kengo, Nakao Hitoshi, Itoda Motoki, Gomi Osa
Attorney & Agent: wang huimin
Abstract:
     There is provided a soft X-ray shielding structure of a soft X-ray irradiation static eliminating apparatus which irradiates air to be supplied with soft X-rays and ionizes the same, the soft X-ray shielding structure allowing the passing of the ionized air and shielding the soft X-rays and including: an accommodation body having a mesh-like inflow opening and a mesh-like outflow opening and made of a soft X-ray shielding material; and a plurality of massive members filled in the accommodation body and made of a substance shielding electromagnetic waves.
Time: 10