Title: Hot plate unit
Application Number: 00801628 Application Date: 2000.07.17
Publication Number: 1319251 Publication Date: 2001.10.24
Approval Pub. Date: 2004.04.28 Granted Pub. Date: 2004.04.28
International Classifi-cation: H01L21/027;H05B3/68
Applicant(s) Name: Ibiden Co., Ltd. Address:
Inventor(s) Name: Furukawa Masakazu;Ito Yasutaka
Attorney & Agent: zan meiqi
Abstract:
    A hot plate unit (1) capable of uniformly cooling a hot plate in a short time, comprising a hot plate (3) having heating elements (10) and a casing (2) supporting the hot plate, wherein the hot plate and the casing forms an internal space S1, and two flow-in ports (17) and two underside opening parts (31) are formed in a bottom wall (2a) of the casing.
Time: 30
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