Title: One-chip silicon-base miniature capacitor microphone and manufacturing method thereof
Application Number: 200510026626 Application Date: 2005.06.09
Publication Number: 1694576 Publication Date: 2005.11.09
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: H04R19/04,H04R31/00
Applicant(s) Name: Fudan Univ. Address: 200433
Inventor(s) Name: Feng Yi, Hu Huijun, Hu Zongbao, Ji Xinming, Li Jun
Attorney & Agent: lu fei sheng zhifan
Abstract:
     This invention relates to a new structure single chip silicon-base micro-condenser microphone in which, the vibration film is processed by high elastic mono-crystal silicon film, the back pole plate is made up of PI thick films, the diaphragm electrode and the back electrode are led out by concentrated boron buried electrode, only a metal layer with the thickness greater than 1 mum is processed on the hot-pressed feet, micro-acoustic holes are set on the back pole plate, a JFET source follower is integrated on the front of a mono-crystal silicon substrate forming vibration films to reach the aim of impedance transformation. The mono-crystal silicon film is released by HF vapor phase corroding technology, no adhesion occurs between the vibration film and the back pole plate to increase the rate of product greatly.
Time: 8
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