Title: Acoustic resonator and filter element
Application Number: 200610143239 Application Date: 2006.11.01
Publication Number: 1960177 Publication Date: 2007.05.09
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: H03H9/00;H03H9/02;H03H9/15;H03H9/54;G10K11/02
Applicant(s) Name: Matsushita Electric Ind Co., Ltd. Address:
Inventor(s) Name: Uno Takashi;Tsurumi Naohiro;Yahata Kazuhiro;Sakai
Attorney & Agent: wanghui min
Abstract:
    A bulk acoustic resonator has an acoustic reflector portion formed on a substrate and including one or more low acoustic impedance layers and one or more high acoustic impedance layers having a higher acoustic impedance than the low acoustic impedance layer which are disposed in stacked relation and an acoustic resonator portion formed on the acoustic reflector portion and having a piezoelectric film. At least one of the low acoustic impedance layers is made of silicon.
Time: 9
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