Title: Mesa-shaped piezoelectric resonator element
Application Number: 200610142790 Application Date: 2006.10.31
Publication Number: 1960178 Publication Date: 2007.05.09
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: H03H9/19
Applicant(s) Name: Epson Toyocom Corp. Address:
Inventor(s) Name: Naito Matsutaro;Aoshima Yoshiyuki
Attorney & Agent: huanglun wei
Abstract:
    A mesa-shaped piezoelectric resonator element including a resonator section having a thicker thickness than a peripheral section on the board surface of a piezoelectric substrate formed in a rectangular shape, wherein, when the length of the long side of the piezoelectric substrate is x and the board thickness of the resonator section is t, etching depth y of a level-difference section is set to fulfill a relationship in the following equation, based on the board thickness t. y = - 132 x t 43 - 5.
Time: 11