Title: Piezoelectric thin-film resonator and filter
Application Number: 200610137474 Application Date: 2006.10.27
Publication Number: 1956324 Publication Date: 2007.05.02
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: H03H9/15;H03H9/17;H03H9/54
Applicant(s) Name: Fujitsu Media Devices Ltd. Address:
Inventor(s) Name: Taniguchi Shinji;Yokoyama Tsuyoshi;Hara Motoaki;Sa
Attorney & Agent: sunhai long
Abstract:
    The invention provides a piezoelectric thin-film resonator and filter. The piezoelectric thin-film resonator includes a lower electrode formed on a substrate to define a rounded dome-shaped cavity between the lower electrode and the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film. A membrane region is an overlapping region of the lower electrode and the upper electrode interposing the piezoelectric film and a projected area of the cavity onto the substrate includes the membrane region.
Time: 15