Title: Piezoelectric resonator and method for producing the same
Application Number: 200610137387 Application Date: 2006.10.19
Publication Number: 1953322 Publication Date: 2007.04.25
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: H03H9/15;H03H9/17;H03H9/02;H03H3/02;H01L41/09;H01L41/22
Applicant(s) Name: Matsushita Electric Industrial Co., Ltd. Address:
Inventor(s) Name: Kamiyama Tomohide;Onishi Keiji;Nakatsuka Hiroshi;Y
Attorney & Agent:
Abstract:
    An upper electrode 103 is provided on one main surface of a piezoelectric layer 101, and a lower electrode 102 is provided on the other main surface thereof. A vibration section 104 is an area in which the lower electrode 102, the piezoelectric layer 101 and the upper electrode 103 overlap in a vertical projection direction. Line electrodes 108 for respectively connecting the lower electrode 102 and the upper electrode 103 to input/output electrodes 107 are provided on the one main surface and the other main surface of the piezoelectric layer 101. The vibration section 104 is placed on (connected to) the substrate 105 via the support section 109. The support section 109 is provided on an area of the piezoelectric layer 101 excluding the area on which the vibration section 104 is provided and the area on which the input/output electrodes 107 and the line electrodes 108 are provided.
Time: 20