Title: Device including piezoelectric thin film and method for producing the same
Application Number: 200610137416 Application Date: 2006.10.18
Publication Number: 1953323 Publication Date: 2007.04.25
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: H03H9/17;H03H9/13;H03H9/46;H03H3/02;B81B3/00;B81C1/00
Applicant(s) Name: Matsushita Electric Industrial Co., Ltd. Address:
Inventor(s) Name: Nakatsuka Hiroshi;Onishi Keiji;Yamakawa Takehiko;I
Attorney & Agent: zhangxin
Abstract:
    An acoustic resonator according to the present invention includes a substrate 105 , a support section 104 provided on the substrate 105 , a lower electrode 103 provided on the support section 104 , a piezoelectric body 101 provided on the lower electrode 103 , and an upper electrode 102 provided on the piezoelectric body 101 . The lower electrode 103 , the piezoelectric body 101 and the upper electrode 102 form a vibration section 107 . The support section 104 for supporting the vibration section 107 is shaped such that at least one portion of a vertical cross-section thereof has a curvature.
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