Title: Methods and apparatus for symmetrical and/or concentric radio frequency matching networks
Application Number: 200610112258 Application Date: 2006.08.29
Publication Number: 1925322 Publication Date: 2007.03.07
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: H03H7/38;H01J37/32
Applicant(s) Name: Applied Materials Inc. Address:
Inventor(s) Name:
Attorney & Agent: xujin guo lianghui
Abstract:
    Apparatus and methods are provided that are adapted to match the impedance of an electrical load to an impedance of an electrical signal generator. The invention includes providing a plurality of electrical components adapted to collectively match the impedance of the electrical load to the impedance of the electrical signal generator. The electrical components are arranged symmetrically and concentrically about an axis. Additionally, the invention may also include a first connector adapted to electrically couple the electrical signal generator to the electrical components. Additionally, the invention may also include a second connector adapted to electrically couple the load to the electrical components. Numerous other aspects are provided.
Time: 9
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