Title: Resonator of microelectronic mechanical system and its production
Application Number: 200610012849 Application Date: 2006.06.16
Publication Number: 1897460 Publication Date: 2007.01.17
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: H03H9/02;H03H9/15
Applicant(s) Name: Yan Jize Address:
Inventor(s) Name: Yan Jize;Zeng Yi
Attorney & Agent: wang yonggong
Abstract:
    The resonator thereof comprises a substrate, a resonance structure, an anchorage device for securing the resonance structure, an electrode and an output electrode. The resonance structure is secured in the substrate using the anchorage device; the input electrode is connected to the resonance structure using a variable parallel plate capacitor; the output electrode is connected to the resonance structure using a variable parallel plate capacitor. The substrate and the resonance structure are made of one kind of material from silicon, germanium, carbide and piezoelectric ceramic. The resonator can be integrated with one kind of component from micro-electronic chip, bipolar transistor, MOS component, CMOS component, MOSFET, JFET and IGFET.
Time: 11
<- Previous Patent:Suspended device and method of ma...   |  Next Patent:Signal processing device ->