Title: Piezoelectric vibration piece and piezoelectric device
Application Number: 200610065290 Application Date: 2006.03.21
Publication Number: 1838533 Publication Date: 2006.09.27
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: H03H9/215,H03H9/10,H01L41/09,H01L41/18,H03B5/32
Applicant(s) Name: Seiko Epson Corp. Address:
Inventor(s) Name:
Attorney & Agent: huang lunwei
Abstract:
     A piezoelectric vibration piece includes a base made of a piezoelectric material; a plurality of vibration arms which is integrally formed with the base and extends in parallel; elongate grooves which are formed along longitudinal directions of the vibration arms; and excitation electrodes which include inner electrodes disposed in the elongate grooves and side electrodes disposed in side surfaces facing the inner electrodes, wherein widening portions in which the widths of the vibration arms are widened toward the base at a joint between the vibration arms of the base are formed, and the side electrodes are led to principal surfaces and side surfaces of the widening portions.
Time: 15
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