Title: Piezoelectric ceramic driving power based on voltage and current composite control
Application Number: 200610151114 Application Date: 2006.12.08
Publication Number: 1988197 Publication Date: 2007.06.27
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: H01L41/107;H02N2/00
Applicant(s) Name: Harbin Polytechnic Univ. Address:
Inventor(s) Name: Rong Ruibin;Sun Lining;Zou Huan;Xu Min
Attorney & Agent: zuyu qing
Abstract:
    This invention discloses a piezoelectric ceramic drive supply based on compound control of voltage and current including a piezoelectric ceramic Z, a high voltage operation amplifier A1 connecting to both ends of the ceramic and an inside and outside cycle compound control circuit, in which, the inside cycle constitutes a current control one by serially connecting feedback resistor R1 on the piezoelectronic ceramics, the ouside cycle composes a proportion integral controller by the operational amplifierA2, resistor R2, mutual parallel adjustable resistor R4 and adjustable capacitor C1 connected between the output ends of R2 and A1 to realize voltage feedback of the outside cycle, the drive supply of the ceramics is tested to apply control voiltage to charge the ceramics for a period of time to test the shift volume in a fixed period to measure the maximum bandwidth of 2.5KHz, the minimum stable frequency of 0,1Hz, the minimum stabilizing time of the open-loop step response of 1ms and the smallest location error less than 4nm when the piezoelectric ceramics based on compound control is in the sphere of 0-10 mum.
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