Title: Surface wave acoustic nano fluid driver and its producing method
Application Number: 200610102212 Application Date: 2006.12.01
Publication Number: 1988356 Publication Date: 2007.06.27
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: H02N2/00;F17D1/08
Applicant(s) Name: Hebei Univ. of Science and Engineering Address:
Inventor(s) Name: Zeng Yi;Yan Jize
Attorney & Agent: wangyong gong
Abstract:
    This invention relates to a surface wave acoustic nm fluid driver composed of five parts, in which, the driver is fixed on the substrate, a nm fluid channel is placed at the emission direction of surface waves of the driver, a heater is set in the substrate at the bottom of the channel. The preparation method includes: preparing a SOI substrate, which is a three-layer structure composed of a surface film Si, a middle SiO2 isolation layer and a Si base layer connected together by a bonding technology, a micromechanical processing technology is used in preparing a grid electrode of the driver on the substrate, a resistor of a heater and fitting out the control electrode and heating electrode of the driver on the substrate.
Time: 8