Title: A processing method for MEMS micro generator based on inorganic electret
Application Number: 200610113570 Application Date: 2006.09.30
Publication Number: 1953315 Publication Date: 2007.04.25
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: H02N1/00;H02N1/08
Applicant(s) Name: Peking University Address:
Inventor(s) Name: Zhang Jinwen;Hao Yilong;Jin Yufeng;Tian Dayu;Wang
Attorney & Agent: guanchang
Abstract:
    The invention relates to a method for processing MEMS micro generator based on inorganic electret. Wherein, it comprises (1), light etching the surface of inorganic substrate, splashing metal electrode, removing it to obtain lower metal electrode; (2), depositing inorganic electret film on the surface of substrate, via etching and corrosion to form electret pattern; (3), etching the surface of silicon substrate, corroding into shallow groove, pouring boron into silicon surface; (4), combining the silicon substrate with inorganic substrate, while the surface with shallow groove of silicon substrate is opposite to the surface with electret pattern of inorganic substrate; (5), etching the upper silicon substrate to form upper electrode plate, while the etching part is relative to the position of electret pattern; (6), pouring charge into inorganic electret film, to obtain said MEMS micro generator. The invention support batch production with wide application.
Time: 14
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