Title: Feeding power connector and electro-static chuck device
Application Number: 200610128942 Application Date: 2006.09.04
Publication Number: 1945905 Publication Date: 2007.04.11
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: H01R24/00;H02N13/00;H01L21/687
Applicant(s) Name: Tomoegawa Co., Ltd. Address:
Inventor(s) Name: Kawase Ritsu;Hasegawa Yuuichi;Yagi Hiroshi
Attorney & Agent: chenwei
Abstract:
    The invention aims to provide a power supply connector capable of stably maintaining vacuum state in case of operating it for long time, preventing vacuum discharge at a contact part of the power supply connector and a device main body by preventing entrance and exit of the air when the operation is alternately repeated in a state of atmospheric pressure and vacuum state, capable of obtaining uniform quality, and to provide an electrostatic chuck device provided with the power supply connector. The power supply connector 100, connecting a lead wire 30 composed of a conductive wire 31 and a covering layer covering the conductive wire so that the conductive wire is extended and exposed at its terminal part, has a connector main body 10 having an insertion hole 13 in which the lead wire 30 is inserted, and a power supply pin 20 mounted on the connector main body 10, electrically connected to the lead wire 31. A resin filled part 12 in which resin 60 is filled is formed at a position where a part of the lead wire extended from an end part of the covering layer or from the end part is located.
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