Title: Method and device for detecting arcs
Application Number: 200610171233 Application Date: 2006.12.21
Publication Number: 1987490 Publication Date: 2007.06.27
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: G01R17/00;G01R19/00;C23C14/34;C23C14/54;H01J37/34;H02H7/00;H05H1/46
Applicant(s) Name: Huttinger Elektronik GmbH Address:
Inventor(s) Name: Axenbeck Sven;Bannwarth Markus;Steuber Martin;Dr.
Attorney & Agent: linjin hui
Abstract:
    An arc detection means for detecting arcs in a plasma process includes at least one comparator to which an evaluation signal such as an output signal or an internal signal of an AC generator relating to the output signal and a reference value are supplied. The comparator is connected to a logic component that generates a signal for an arc suppression device.
Time: 14