Title: Single crystalline A-plane nitride semiconductor wafer having orientation flat
Application Number: 200610150276 Application Date: 2006.10.18
Publication Number: 1958887 Publication Date: 2007.05.09
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: C30B29/40;C30B29/38;C30B25/02;H01L21/205;H01L33/00;H01S3/16
Applicant(s) Name: Samsung Corning Co., Ltd. Address:
Inventor(s) Name: Shin Hyun Min;Lee Ki Soo
Attorney & Agent: gujin wei liuji fu
Abstract:
    A single crystalline a-plane nitride semiconductor wafer includes one to three orientation flats in a crystalline direction, wherein a-plane ({11-20} plane) is formed as a main plane. Since plane orientation can easily be recognized, accuracy can be improved when a semiconductor device is formed on the nitride semiconductor wafer.
Time: 9